SRD FAQ #10

FAQ Index

Preparing SRD’s for storage and or shipment to Rhetech

    SRD Decommission Procedure

  • Hook N2/CDA to both DI and N2 facility inlets and run a rinse and dry recipe 2 times.
    (Dry recipe: rinse 60 seconds, Q-Rinse 00.Mega ohms, Purge-10 seconds, Dry 1-160 seconds, Dry 2-240 seconds). This blows out the DI lines and dries the chamber.
  • Remove the P trap located in the rear of the SRD and dry it out.

  • Vac dry the drain box,
    make sure the resistivity probe is dry.
semiconductor semitool products parts SRD storage shipment

Preparing SRD’s for Shipment

  • Remove the rotor and pack it in a separate box. Package using bubble wrap, spray foam or similiar materials to guard against damage.

  • Stacker models using LTL truck method: Shrinkwrap/bubble wrap and strap/band to a skid or crate. (Note: Take care when strapping unit not to damage drain box and plumbing outlets).

  • Stacker models using dedicated carrier method:
    Shrinkwrap/bubble wrap SRD and wrap in shipping blanket. Securely strap unit to trailer wall.
    (Note: Again take care when strapping unit not to damage drain box and plumbing outlets).

  • Benchtop models: Place foam or similiar material in bottom of carton. Pack around all sides of SRD in carton with spray foam packing material, bubble wrap or similiar material. Secure carton to a pallet using strapping/banding.
    (Note: Again take care when strapping unit not to damage drain box and plumbing outlets).
    semiconductor semitool products parts SRD storage shipment
    		semiconductor semitool products parts SRD storage shipment semiconductor semitool products parts SRD storage shipment

 

Still have questions? Contact Rhetech Customer Service

Rhetech, Inc. 416 South 4th Street, Coopersburg, PA 18036-2039, Phone 610.282.0105, FAX: 610.282.0789
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