SRD FAQ #13

FAQ Index

There is a constant N2 flow into the Bowl. Is this normal?

This is the Low Pressure Purge (LPP). It is there for a number or reasons:

  • A blanket of N2 is maintained in the drain box for proper resistivity readings during the rinse cycle.

  • N2 is kept flowing past the N2 heater until it is cool. (Result:heater lasts longer and stays cleaner).

  • Maintaining positive N2 pressure in the bowl.

semiconductor srd low pressure purge N2 heater

Still have questions? Contact Rhetech Customer Service

Rhetech, Inc. 416 South 4th Street, Coopersburg, PA 18036-2039, Phone 610.282.0105, FAX: 610.282.0789
©2008 All Rights Reserved. Rhetech, Inc.