SRD FAQ #3a

SRD Vibration: Possible cause out of balance rotor

Rotor information is etched on the front of each rotor. Check that the cassette used matches the carrier specs of the rotor.

semiconductor parts and equipment srd rotor

Also verify that the rotor was balanced for the amount of substrates being used.


Rotor specifications can be found on the edge of each cassette.

Check that the substrates are placed in the carrier as specified on the rotor. The photo above illustrates the proper loading for a rotor/cassette balanced for 13-25 wafers, H-bar in. (Any load of less than 25 wafers needs to be evenly spaced inside cassette).

Still have questions? Contact Rhetech Customer Service