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June 2007

Welcome to Rhetech ADVANTAGE ™ A quarterly publication of Rhetech, Inc. In this edition … Case History: Imagine and it comes true!... 10 chamber, high volume plating tool specialized to customer specifications ... What every 300mm bumping line needs ... Low cost batch rinsing & drying New Products : NEW rotor design runs multiple sized cassettes without rotor change ... Semicon West - July 17-19: Visit our new expanded booth #1751 in South Hall   And, as always, Frequently Asked Questions … Imagine… and it comes true! 10 chamber, high volume, production plating tool built to custom specifications Case History: Have you ever looked at some of your tools and thought "now that I purchased this tool, I sure wish it could …." Rhetech is the perfect company to make your dreams come true. We specialize in remanufacturing tools to meet your specifications. Let us know what you have been dreaming about for your processes and if it can be done-Rhetech is the company that can do it! One recent example is a Semitool LT210C ten chamber, high volume production, plating tool. (See photo on right) The customer had an unusual process and purchased a Semitool LT210C plating tool with a standard configuration several years ago. Once he had the tool running his process (a very thick plating step), he realized that the configuration could be tweaked to increase the throughput by 25%.   Rhetech remanufactured another LT210C plating tool into exactly what the customer needed--a custom split tool design with two chemical tanks and added redundancy to ensure maximum uptime. They also upgraded it with the latest monitors, individual chamber Levitronix pumps, filters, and metrology; and had it up and running the customer's process in record time. Meeting your needs is our specialty! What every 300mm bumping line needs! While the need for batch rinsing and drying has diminished in the 300mm wafer fabs, there is still a need for a low cost batch rinse and dry tool on every 300mm bumping line. The Semitool 4400L offers a cost efficient solution to these 300mm drying needs.   The SRD controller stores up to nine different recipes for efficient and time-saving rinsing and drying. The unit can be configured to use a rotor with a Semitool Teflon clamshell that provides full wafer protection, or customers can choose a rotor that holds the new Dianichi CR 300 cassette (shown above) which contains up to twenty-five 300mm wafers. Contact sales for a quote How can I run more than one size wafers in the same tool without changing the rotor? Rhetech's solution provides newly designed adapter inserts which fit into a quick release master rotor. These inserts handle standard cassettes and allow several different cassette sizes to be used in the same tool without changing the rotor.       The example shown on left has a master rotor with a 270 rotor base for wafer sizes to 150mm). The 150mm adapter insert holds an A182-60 MB-0215 cassette (shown inserted in master rotor on left). The 125mm inch adapter holds an A182-50 MB-0215 cassette. This unique design offers significant cost savings compared to the standard clamshell solution traditionally used to accommodate different size substrates and cassettes. Other insert sizes are available Contact Rhetech more information. Frequently Asked Questions (FAQs) Check the FAQs (Frequently Asked Questions), our illustrated SRD and system tool technical support guide ... SRD FAQs, System Tool FAQs   Need live technical support for your tool? Rhetech's ready to help. Privacy Policy Rhetech respects your time and privacy. Our electronic mailing list is not shared with anyone outside of our company. It's only used to send our friends and customers this quarterly update on technical developments, case histories and new products. If you do not wish to receive the Advantage newsletter in the future, you can be permanently taken off our list.