Flat Panel Display Manufacturing

Remanufactured Semitool Semiconductor Equipment
New Tool Performance for Less

• Process Consistency
• Reduced Chemical Consumption
  
• Enhanced Operator Safety
  

Centurium Spray Solvent and Acid Tools accommodate substrates up to 18” (460mm) diameter, 15” (380mm) square.

Photoresist strip: Centurium SST 2600 (Solvent Tool)

• Fully Enclosed
• Low Footprint
  
• 12 Substrates up To 18" (460mm)
  
• Heated Chemistries, Multiple Recipies
• Chemical Reclaim

Metal etching and critical cleans : Centurium SAT 2600
(Spray Acid Tool)

• Fully Enclosed
• Low Footprint
  
• 12 Substrates up to 18" (460mm)
  
• Heated Chemistries, Multiple Recipies
• Chemical Reclaim

Rinsing, Drying: 4600L SRD
(Spin Rinser Dryer)

• Low Footprint
  
• 13 Substrates up to 380 mm square
  
• Throughput typically 50-60 per hour
• 95 % uptime