SRD Wafer Handling Capabilities & Configurations
SRD               Bowl Size	Max Wafer Size		Models & Configurations
	Round	Square	Benchtop	Rollaround	Stacker
240	100 mm	100 mm	240S	440S	840S
270	150 mm	150 mm	270F/270S	470F/470S	870F/870S
280	200 mm	175 mm		Sceptor-C	Sceptor-S
280	200 mm	175 mm	280S	480S	880S
2300	230 mm	200 mm	2300S	4300S	8300S
2400	362 mm	300 mm		4400L
2600		380 mm		4600L
				4600
240RM	100 mm	100 mm	240RM - for rigid media;                         w/o controller, for wet bench