Rotors and Clamshells
Semitool Clamshells Save Time, Increase Yield
- Run multiple size wafers without rotor change
- Open Clamshell Design - Better wafer coverage
- Superior Wafer Protection - Reduce breakage
Semitool Rotors, we've built thousands.
Rhetech's experience means the highest quality rotors. Better performance and reliabilty than competitors products.
Standard Semitool or custom rotors engineered to your specifications.
Bowl sizes from 240 to 2600 (100mm to 380mm - diameter product)
- Special rotor design capabilities
- Fast turnaround on rotor repairs
- Rotor balancing and EP services
About Rotors and Cassettes
Rotors are marked with specifications and these need to match the cassette type for proper operation. (See photo at right).
Running too many or too few wafers in the rotor can unbalance the rotor, causing excessive vibration and or damaging the tool & wafers. Read more ...
High or Low Profile Cassette? 
If you plan to run 200mm wafers in your model 280, 480, or 880 SRD first make sure that your cassette will fit! Details ...
Semitool wafer handling capabilities & configurations matrix