Spray Acid Tools
Semitool Spray Acid Tool (SAT) for wafer processing:
Batch, semi-automated 25-wafer, single or dual chamber chemical cleaning, stripping wafer reclaim and etching tool.
Custom Configurations
Comprehensive Service & After Sales Support
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| Class 1 | ||||||||||||||
 1 chamber | ||||||||||||||
 3 chamber |
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| Freestanding | ||||||||||||||
 3 chamber |
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 1 chamber | ||||||||||||||
 2 chamber |
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