Rhetech Inc supports all previous generation Semitool platforms. We manufacture new Semitool SRDs, as well as the Rhetech brand of remanufactured SRDs. Semitool Spray Acid and Spray Solvent batch tools (aptly named SAT and SST) have a multitude of uses either in the front end of the line, or the back end of the line. Processes include cleaning, etching, polymer removal, photoresist strip, and other wet process steps. The versatile single wafer Equinox platform (new and remanufactured) is also now solely built within our facility. This platform is used for electro-plating, polymer removal, resist stripping, and a host of other wet processes performed in wafer manufacturing, MEMS production, chip production, and advanced packaging.
Click on a link or photo to view tool lines and datasheets
Spray Solvent |
![]() Spray Acid |
![]() Spin Rinse Dryers |
![]() Spectrum |
![]() Equinox |
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![]() LT Series Linear HVM Tools |
All our tools come complete with a warranty so you know that you are getting guaranteed quality within each and every tool. Rhetech also offers upgrades on your tools to improve reliability, enhance process capability, or to replace obsolete parts, so you can meet your constantly changing semiconductor manufacturing requirements. Please contact us with questions regarding any of our products, or to receive a quote.
Restored to the latest Semitool standards for new tool performance.
The Rhetech Advantage, learn more.